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产品详情

       半导体生产过程中需要用到大约40种气体,如HF, nf3, BF 3, sicl4。所以输送这些气体的管道品质尤为重要,因为在纳米细化工艺中使用的氟化氢所需99.9999999%的高纯度。UHP(超高纯度)管正好具有优异的耐腐蚀性和内部粗糙度以及必须的洁净度。我司一直为我们的客户供应半导体,医药,航空和精密机械等行业所需的较高内表面和洁净度等无缺陷要求的不锈钢高纯管。

About 40 kinds of gas are used in semiconductor production processes such as HF, NF3, BF3, SiCl4。The quality of the gas transfer tube is very important because 99.999999999% high purity is required for hydrogen fluoride used in the Nano size fine process. Since UHP (Ultra High Purity) tubes with high corrosion resistance as well as good internal roughness and cleanliness are needed, has been supplying our customers in semiconductor, medical, aerospace, and precision measuring machines with excellent interior roughness and cleanliness。

产品数据Product Details:


生产工艺Process Method: Cold Drawn / Cold Roll& Bright Annealed & Electro polished

主要材质Available Material:

TP304L, TP316L, TP316L-S2, EN 1.4301, EN 1.4404, EN 1.4435, other grades can be offered on request.

Elements

304L

316L

316L-S2

( C ) Carbon - max

0.035

0.035

0.035

(Mn) Manganese-max

2.00

2.00

2.00

(P) Phosphorus-max

0.045

0.045

0.045

(S) Sulphur

0.03

0.03

0.005-0.012

(Si) Silicon-max

1

1

1

(Ni) Nickel

8.0-12.0

10.0-14.0

10.0-14.0

(Cr) Chromium

18.0-20.0

16.0-18.0

16.0-18.0

(Mo) Molybdenum

N/A

2.0-3.0

2.0-3.0

标准Standards: ASTM A269, EN 10216-5 TC1

规格尺寸:

外径Outside diameter range from 6.35-50.8mm

壁厚 Wall thickness range from 0.71-2.77mm

内表面粗糙度:Inner surface roughness can be according to customers' request and reach up to Ra<0.2μm

应用领域Applicable industries:

Semiconductor, microelectronics

Display industries (TFT/LCD, LED and OLED)

Gas/Bio/Medical Equipment

产品等级:

BA Ra<0.4μm

EP Ra<0.2μm


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